Radioelektronikos terminų žodynas. – Vilnius : BĮ UAB „Litimo“. Kazimieras Gaivenis, Gytis Juška, Vidas Kalesinskas. 2000.
Lithography — Charles Marion Russell s The Custer Fight (1903). Note the range of tones, fading toward the edges … Wikipedia
Electron beam lithography — (often abbreviated as e beam lithography) is the practice of scanning a beam of electrons in a patterned fashion across a surface covered with a film (called the resist),cite book |last= McCord |first=M. A. |coauthors=M. J. Rooks |title=… … Wikipedia
Extreme ultraviolet lithography — (also known as EUV or EUVL ) is a next generation lithography technology using the 13.5 nm EUV wavelength. EUVL opticsEUVL is a significant departure from the deep ultraviolet lithography used today. All matter absorbs EUV radiation. Hence, EUV… … Wikipedia
Multiphoton lithography — (also known as direct laser lithography or direct laser writing) of polymer templates has been known for years by the photonic crystal community. Similar to standard photolithography techniques, structuring is accomplished by illuminating… … Wikipedia
Proximity effect (electron beam lithography) — The proximity effect in electron beam lithography (EBL) is the phenomenon that the exposure dose distribution, and hence the developed pattern, is wider than the scanned pattern, due to the interactions of the primary beam electrons with the… … Wikipedia
Positivresistlithografie — pozityvinė fotolitografija statusas T sritis radioelektronika atitikmenys: angl. positive resist lithography vok. Positivresistlithografie, f rus. фотолитография по позитивному фоторезисту, f pranc. lithographie sur le photorésist positif, f … Radioelektronikos terminų žodynas
lithographie sur le photorésist positif — pozityvinė fotolitografija statusas T sritis radioelektronika atitikmenys: angl. positive resist lithography vok. Positivresistlithografie, f rus. фотолитография по позитивному фоторезисту, f pranc. lithographie sur le photorésist positif, f … Radioelektronikos terminų žodynas
pozityvinė fotolitografija — statusas T sritis radioelektronika atitikmenys: angl. positive resist lithography vok. Positivresistlithografie, f rus. фотолитография по позитивному фоторезисту, f pranc. lithographie sur le photorésist positif, f … Radioelektronikos terminų žodynas
фотолитография по позитивному фоторезисту — pozityvinė fotolitografija statusas T sritis radioelektronika atitikmenys: angl. positive resist lithography vok. Positivresistlithografie, f rus. фотолитография по позитивному фоторезисту, f pranc. lithographie sur le photorésist positif, f … Radioelektronikos terminų žodynas
Photolithography — For earlier uses of photolithography in printing, see Lithography. For the same process applied to metal, see Photochemical machining. Photolithography (or optical lithography ) is a process used in microfabrication to selectively remove parts of … Wikipedia
